Nikhila Mahadevapuram
PTD Module and Integration Device Yield Engineer
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 19 March 2015 Paper
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Polymethylmethacrylate, Interfaces, Scattering, Annealing, Thin films, Silicon, Lithography, Picosecond phenomena, Scanning electron microscopy, Microscopy

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