Dr. Niklas Eriksson Profile

Dr. Niklas Eriksson

at Mycronic AB

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Author

Publications (6)

Proceedings Article | 28 August 2003 Paper

Transparent corner enhancement scheme for a DUV pattern generator

Niklas Eriksson, Jonas Hellgren, Hans Martinsson, Mans Bjuggren, Tor Sandstrom

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504276

KEYWORDS: Photomasks, Spatial light modulators, Deep ultraviolet, Mirrors, Image enhancement, Manufacturing, Optical simulations, Solids, Optical proximity correction, Raster graphics

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Proceedings Article | 27 December 2002 Paper

Resolution extensions in the Sigma7000 imaging pattern generator

Niklas Eriksson, Tor Sandstrom

Proceedings Volume 4889, (2002) https://doi.org/10.1117/12.468623

KEYWORDS: Spatial light modulators, Mirrors, Photomasks, Raster graphics, Etching, Reticles, Printing, Dry etching, Image resolution, Reflectivity

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Proceedings Article | 14 April 1999 Paper

Grating coupled surface emitters: integrated lasers, amplifiers, and beam shaping outcouplers

Toshiaki Suhara, Anders Larsson, Masahiro Uemukai, Niklas Eriksson, Hiroshi Nishihara, Peter Modh, Sigurgeir Kristjansson

Proceedings Volume 3626, (1999) https://doi.org/10.1117/12.345429

KEYWORDS: Beam shaping, Waveguides, Diffraction gratings, Resonators, Thermal effects, Wave propagation, Diffraction, Laser resonators, Reflectors, Adaptive optics

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Proceedings Article | 1 April 1999 Paper

High-performance circular grating-coupled surface emitter with focused output beam

Anders Larsson, Stephen Sheard, Niklas Eriksson, Sigurgeir Kristjansson

Proceedings Volume 3628, (1999) https://doi.org/10.1117/12.344519

KEYWORDS: Resonators, Near field, Laser resonators, Diffraction, Laser damage threshold, Modulation, Lasers, Polarizers, Semiconductor lasers, Optical pumping

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Proceedings Article | 1 May 1997 Paper

Grating-coupled surface emitters with built-in beam control

Sigurgeir Kristjansson, Ming Li, Niklas Eriksson, Mats Hagberg, Anders Larsson

Proceedings Volume 3004, (1997) https://doi.org/10.1117/12.273835

KEYWORDS: Waveguides, Diffraction gratings, Beam shaping, Semiconductor lasers, Etching, Reflectors, Optical design, Resonators, Diffraction, Laser resonators

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Proceedings Article | 10 April 1995 Paper

Grating coupled surface emitters with enhanced surface emission efficiency

Anders Larsson, Mats Hagberg, Torgil Kjellberg, Niklas Eriksson

Proceedings Volume 2398, (1995) https://doi.org/10.1117/12.206344

KEYWORDS: Diffraction gratings, Reflectors, Waveguides, Diffraction, Cladding, Optical design, Etching, Fabrication, Absorption, Phase matching

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Showing 5 of 6 publications

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