Dr. Nikolaos Kehagias
at ICN2
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 26 March 2019
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Modeling, Metrology, Statistical analysis, Computational modeling, Image segmentation, Image processing, Image acquisition, Computer simulations, Scanning electron microscopy, Nanoimprint lithography, Defect inspection

Proceedings Article | 25 June 2014
Proc. SPIE. 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI
KEYWORDS: Thin films, Nanostructures, Scattering, Annealing, Silicon, Scanning electron microscopy, Silicon films, Directed self assembly, Picosecond phenomena, Nanoimprint lithography

Proceedings Article | 20 March 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Diffraction, Metrology, Polymethylmethacrylate, Polymers, Silicon, Aluminum, Nanoimprint lithography, Photoacoustic spectroscopy, Semiconducting wafers, Diffraction gratings

Proceedings Article | 3 June 2005
Proc. SPIE. 5825, Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks
KEYWORDS: Fabrication, Optical components, Waveguides, Polymers, Ultraviolet radiation, Silicon, Photomasks, Nanoimprint lithography, Reactive ion etching, Polymer thin films

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