Dr. Nikolay A. Djuzhev Profile

Dr. Nikolay A. Djuzhev

at National Research Univ of Electronic Technology

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Author

Publications (6)

Proceedings Article | 31 January 2022 Paper

Techniques for analyzing digital elevation models of surface topography of microelectronics objects

A. Dedkova, I. Florinsky, N. Djuzhev

Proceedings Volume 12157, 121571K (2022) https://doi.org/10.1117/12.2623908

KEYWORDS: Surface properties, Surface roughness, 3D surface sensing, Nanotechnology, Semiconducting wafers, Microelectronics, Silicon, Shape analysis, Data modeling, Visualization, Thin films, Mathematical modeling

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Proceedings Article | 31 January 2022 Paper

Investigation of the influence of the parameters of the temporary bonding and thinning operations on the bending of silicon wafers

N. Djuzhev, M. Makhiboroda, E. Gusev, M. Fomichev, A. Dedkova, P. Ivanin

Proceedings Volume 12157, 1215712 (2022) https://doi.org/10.1117/12.2623584

KEYWORDS: Semiconducting wafers, Wafer bonding, Silicon, Packaging, Adhesives, Manufacturing, Glasses, Standards development, Lithography, Transistors

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Proceedings Article | 15 March 2019 Paper

Finite-element predictive 3D modelling and optimization of membrane-based thermoresistive MEMS accelerometers

N. Djuzhev, R. Lapshin, A. Belin, A. Ovodov, D. Novikov, G. Demin

Proceedings Volume 11022, 110220R (2019) https://doi.org/10.1117/12.2522515

KEYWORDS: Microelectromechanical systems, 3D modeling, Resistors, Thermal modeling, Optimization (mathematics), Sensors, Resistance, Thermal effects, Reliability, Atmospheric physics

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Proceedings Article | 15 March 2019 Paper

TCAD-based performance analysis of nanoscale vacuum field-emission transistors at advanced technology nodes

I. Evsikov, N. Djuzhev, G. Demin, M. Makhiboroda

Proceedings Volume 11022, 110220O (2019) https://doi.org/10.1117/12.2522483

KEYWORDS: Transistors, Nanowires, Silicon, 3D modeling, TCAD, Field effect transistors, Device simulation, CMOS technology

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Proceedings Article | 15 March 2019 Paper

Maskless nanolithography on the basis of microfocus x-ray tubes: conversion of electron energy into the BeKα line

N. Chkhalo, A. Ya. Lopatin, A. Pestov, N. Salashchenko, G. Demin, N. Dyuzhev, M. Makhiboroda

Proceedings Volume 11022, 110221M (2019) https://doi.org/10.1117/12.2522105

KEYWORDS: Beryllium, X-rays, Photomasks, Nanolithography, Signal detection, Lithography, Mirrors, Electron beams, Solids, Thin films

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Proceedings Article | 30 December 2016 Paper

Determination of mechanical stress in the silicon nitride films with a scanning electron microscope

N. Djuzhev, E. Gusev, A. Dedkova, N. Patiukov

Proceedings Volume 10224, 1022428 (2016) https://doi.org/10.1117/12.2250118

KEYWORDS: Scanning electron microscopy, Electron microscopes, Silicon, Silicon films, Microelectromechanical systems, Ion beams, Thin films, Semiconducting wafers, Etching, Wet etching

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Showing 5 of 6 publications

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