This paper proposes a variant of application of a decision support system (DSS) in order to form a set of laser
micromachining system configuration parameters on the basis of previously created knowledge base. It is shown that use
of quality control module developed by authors on the basis of optoelectronic sensors and software tools allows the
simplification and automatization of a data collecting process for DSS. Software and hardware elements that were
developed allow making the semiautomatic adjustment of the system for a specific micromachining task solving,
assessment of the experiments results and saving obtained data in the knowledge base.
To optimize laser processing of some materials, it is necessary to ensure high-speed displacement of the focused laser beam
~1 m/s with a great power density. A required speed can be attained owing to scanning systems based on galvanometer
deflectors, but the writing field of such scanning systems is restricted to a size of less than 1 dm<sup>2</sup> for the lasers with λ=1-10
micron. In many laser microprocessing applications a field that must be larger by one order of magnitude required.It is
possible to solve such problems using complementary scanners. We developed several devices with use of complementary
scanning principle for microprocessing with micron resolution by high power lasers (50-400 W). The developed systems
contain the "fast" scanning unit consisting of precision galvanometer scanners and F-Theta lens that, in its turn, can be
displaced by "slow" drives over the entire writing field.
This paper will describe problems arising in creating the systems based on complementary scanner devices, namely,
correct image partitioning into small writing zones, "joining" of writing elements occurred in adjacent zones, and also
consideration of geometric distortions in the optical system of the scanning head and its orientation. Furthermore, in order
to obtain the maximal writing speed with minimal errors over the entire field, we have to ensure effective four-drive system
control. Experimental results of microprocessing of the dielectric specimens, obtained by means of created complementary
scanners system, will be pesent.