Nilesh S. Birari
at Indian Institute of Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 23, 2003
Proc. SPIE. 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III
KEYWORDS: Microelectromechanical systems, Oxides, Multilayers, Resonators, Silica, Silicon, Reliability, Silicon films, Optical simulations, Failure analysis

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