Dr. Nimit Chomnawang
at Suranaree Univ of Technology
SPIE Involvement:
Author
Area of Expertise:
X-ray lithography , MEMS , microsensors , microactuators , microcontroller applications
Websites:
Publications (3)

SPIE Journal Paper | 1 October 2003
JM3 Vol. 2 Issue 04
KEYWORDS: Photoresist materials, 3D modeling, Polymers, Resistance, Surface micromachining, Electroplating, Copper, Reactive ion etching, Capacitance, Electrical engineering

Proceedings Article | 11 July 2002
Proc. SPIE. 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology
KEYWORDS: Polymers, Metals, Ultraviolet radiation, Copper, Silicon, Photoresist materials, Plating, Reactive ion etching, Electroplating, Photoresist developing

Proceedings Article | 16 August 2001
Proc. SPIE. 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS
KEYWORDS: Polymers, Metals, Copper, Nickel, Silicon, Scanning electron microscopy, Photoresist materials, Photomicroscopy, Semiconducting wafers, Electroplating

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