Dr. Nitish Kumar
Researcher at Technische Univ Delft
SPIE Involvement:
Author
Area of Expertise:
Optical Scatterometry , Diffraction , Inverse problems in optics , Phase retrieval , Optical metrology , Aberration retrieval through ENZ
Publications (8)

Proceedings Article | 21 June 2015
Proc. SPIE. 9526, Modeling Aspects in Optical Metrology V
KEYWORDS: Semiconductors, Thin films, Ellipsometry, Spectroscopy, Silicon, Atomic force microscopy, Scatterometry, Solids, Spectroscopic ellipsometry, Applied physics

Proceedings Article | 1 May 2014
Proc. SPIE. 9132, Optical Micro- and Nanometrology V
KEYWORDS: Oxides, Diffraction, Statistical analysis, Data modeling, Deep ultraviolet, Polarization, Error analysis, Silicon, Scatterometry, Scatter measurement

Proceedings Article | 8 March 2014
Proc. SPIE. 8987, Oxide-based Materials and Devices V
KEYWORDS: Oxides, Ellipsometry, Light sources, Spectroscopy, Dielectrics, Image resolution, Polarimetry, Scatterometry, Spectroscopic ellipsometry, Zinc oxide

Proceedings Article | 13 May 2013
Proc. SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII
KEYWORDS: Semiconductors, Photovoltaics, Light emitting diodes, Polarization, Computer simulations, Scatterometry, Optical metrology, Collimation, Information operations, Diffraction gratings

Proceedings Article | 26 November 2012
Proc. SPIE. 8557, Optical Design and Testing V
KEYWORDS: Diffraction, Imaging systems, Lenses, Calibration, Interferometry, CCD cameras, Collimation, Objectives, Digital video discs, Direct methods

Showing 5 of 8 publications
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