Dr. Nobuhiro Kato
at Kindai Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | November 3, 2003
Proc. SPIE. 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II
KEYWORDS: Actuators, Oxides, Sensors, Polymers, Silicon, Scanning electron microscopy, Photomasks, Atomic force microscope, Semiconducting wafers, Anisotropic etching

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