Mr. Nobuo Kochi
Lab Leader at
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | August 18, 2005
Proc. SPIE. 5880, Optical Diagnostics
KEYWORDS: Data modeling, Imaging systems, Cameras, Photography, Digital cameras, 3D modeling, Industrial metrology, 3D metrology, Projection systems, 3D image processing

PROCEEDINGS ARTICLE | May 24, 2004
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Semiconductors, Electron beams, 3D image reconstruction, Magnetism, Image resolution, 3D metrology, Objectives, Optical simulations, Reconstruction algorithms, 3D image processing

PROCEEDINGS ARTICLE | June 2, 2003
Proc. SPIE. 5038, Metrology, Inspection, and Process Control for Microlithography XVII
KEYWORDS: Semiconductors, Electron beams, 3D image reconstruction, Image resolution, 3D metrology, Objectives, Reconstruction algorithms, Algorithm development, Semiconducting wafers, 3D image processing

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