Dr. Nobutoshi Fujii
at Millennium Research for Advanced Information Techn
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | November 17, 2005
Proc. SPIE. 6002, Nanofabrication: Technologies, Devices, and Applications II
KEYWORDS: Silica, Metals, Copper, Dielectrics, Silicon, Plasma etching, Chemical reactions, Semiconducting wafers, Electroplating, Chemical mechanical planarization

PROCEEDINGS ARTICLE | November 17, 2005
Proc. SPIE. 6002, Nanofabrication: Technologies, Devices, and Applications II
KEYWORDS: Carbon, Refractive index, Silica, Dielectrics, Silicon, Transmission electron microscopy, Sol-gels, Head-mounted displays, Cesium, Plasma treatment

PROCEEDINGS ARTICLE | January 19, 2005
Proc. SPIE. 5592, Nanofabrication: Technologies, Devices, and Applications
KEYWORDS: Oxides, Silica, Copper, Dielectrics, Silicon, Bioalcohols, Transmission electron microscopy, Head-mounted displays, Semiconducting wafers, Back end of line

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