Dr. Noga Meir
at Nova Ltd
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 27 April 2023 Presentation + Paper
A. Moussa, J. Bogdanowicz, B. Groven, P. Morin, M. Beggiato, M. Saib, G. Santoro, Y. Abramovitz, K. Houtchens, S. Ben Nissim, N. Meir, J. Hung, A. Urbanowicz, R. Koret, I. Turovets, G. Lorusso, A.-L. Charley
Proceedings Volume 12496, 124961X (2023) https://doi.org/10.1117/12.2657968
KEYWORDS: Semiconducting wafers, Scanning electron microscopy, Monolayers, Scatterometry, 2D materials, Metrology, Atomic force microscopy, Raman spectroscopy, Silicon, Histograms

SPIE Journal Paper | 27 January 2022 Open Access
JM3, Vol. 21, Issue 02, 021203, (January 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.021203
KEYWORDS: Silicon, Germanium, Raman spectroscopy, Optical lithography, Manufacturing, Semiconducting wafers, Polarization, Metrology, Raman scattering, Phonons

Proceedings Article | 25 February 2021 Presentation + Paper
Proceedings Volume 11611, 116111T (2021) https://doi.org/10.1117/12.2582181
KEYWORDS: Raman spectroscopy, Manufacturing, Metrology, Optical lithography, X-ray diffraction, Silicon, Nondestructive evaluation, Germanium, Diffraction, Transistors

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