Dr. Nora V. Edwards
at SEMATECH Inc
SPIE Involvement:
Author
Publications (12)

SPIE Journal Paper | April 1, 2006
JM3 Vol. 5 Issue 02
KEYWORDS: Ruthenium, Silicon, Molybdenum, Extreme ultraviolet lithography, Reflectivity, Electrons, Oxides, Resistance, Transmission electron microscopy, Oxidation

PROCEEDINGS ARTICLE | March 23, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Carbon, Mirrors, Molecules, Reflectivity, Reflectometry, Extreme ultraviolet, Extreme ultraviolet lithography, Synchrotrons, Carbon monoxide, EUV optics

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Mirrors, Iron, Sensors, Ions, Reflectivity, Diagnostics, Photodiodes, Xenon, Extreme ultraviolet, Plasma

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Gold, Mirrors, Etching, Metals, Ions, Extreme ultraviolet, Molybdenum, EUV optics, Plasma, Tin

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Gold, Carbon, Sputter deposition, Ions, Silicon, Xenon, Silicon carbide, Molybdenum, Pulsed laser operation, Plasma

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Gold, Crystals, Ions, Silicon, Atomic force microscopy, Xenon, Palladium, Extreme ultraviolet lithography, Molybdenum, Ruthenium

Showing 5 of 12 publications
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