Prof. Norbert Lindlein Profile

Prof. Norbert Lindlein

Chair of Optics at Friedrich-Alexander-Univ Erlangen-Nürnberg

SPIE Involvement:

Conference Program Committee | Author

Publications (33)

PROCEEDINGS ARTICLE | June 26, 2017

Polarization and phase shifting interferometry

Proc. SPIE. 10329, Optical Measurement Systems for Industrial Inspection X

KEYWORDS: Optical components, Phase shifting, Metrology, Elliptical polarization, Polarization, Birefringence, Interferometry, Wavefronts, Phase interferometry, Phase measurement, Phase shifts

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PROCEEDINGS ARTICLE | February 22, 2017

Important parameters of printed polymer optical waveguides (POWs) in simulation and fabrication

Proc. SPIE. 10098, Physics and Simulation of Optoelectronic Devices XXV

KEYWORDS: Polymethylmethacrylate, Waveguides, Cladding, Aerosols, Polymers, Ultraviolet radiation, Printing, Monte Carlo methods, Ray tracing, Optics manufacturing, Device simulation, Polymer multimode waveguides

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PROCEEDINGS ARTICLE | September 23, 2015

Systematic investigation of the principal and first secondary maxima of ultrashort optical pulses focused by a high numerical aperture aplanatic lens

Proc. SPIE. 9630, Optical Systems Design 2015: Computational Optics

KEYWORDS: Superposition, Ultrafast phenomena, Optical spheres, Polarization, Numerical simulations, Gaussian pulse, Wave propagation, Terahertz radiation, Sodium, Geometrical optics

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PROCEEDINGS ARTICLE | June 22, 2015

Reduction of phase singularities in speckle-shearing interferometry by incoherent averaging of speckle patterns

Proc. SPIE. 9525, Optical Measurement Systems for Industrial Inspection IX

KEYWORDS: Light sources, Speckle, Interferometers, Interferometry, Computer programming, Computer simulations, Speckle pattern, Speckle interferometry, Algorithm development, Structured light

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PROCEEDINGS ARTICLE | May 27, 2011

Diffractive simultaneous lateral shearing interferometry

Proc. SPIE. 8082, Optical Measurement Systems for Industrial Inspection VII

KEYWORDS: Diffraction, Telescopes, Light sources, Polarization, Sensors, Interferometry, Wavefronts, Phase measurement, Diffraction gratings, Shearing interferometers

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PROCEEDINGS ARTICLE | August 24, 2009

Dynamic array spot shaping for laser micro machining

Proc. SPIE. 7430, Laser Beam Shaping X

KEYWORDS: Optical components, Telescopes, Homogenization, Microlens array, Diffractive optical elements, Diffusers, Microlens, Excimer lasers, Beam shaping, Beam homogenizers

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PROCEEDINGS ARTICLE | August 11, 2008

Interferometric null test of a parabolic reflector generating a Hertzian dipole field

Proc. SPIE. 7063, Interferometry XIV: Techniques and Analysis

KEYWORDS: Reflectors, Telescopes, Mirrors, Eye, Optical spheres, Interferometers, Interferometry, Solids, Spherical lenses, 3D vision

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PROCEEDINGS ARTICLE | April 30, 2008

Reliable simulation of optical bridge system by exchanging optical field data

Proc. SPIE. 6994, Photon Management III

KEYWORDS: Optical components, Zemax, Lenses, Single mode fibers, Semiconductor lasers, Micro optics, Bridges, Optical simulations, Strontium, Performance modeling

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PROCEEDINGS ARTICLE | April 25, 2008

Wave-optical simulation of a grating lateral shearing interferometer with a periodic incoherent light source

Proc. SPIE. 6994, Photon Management III

KEYWORDS: Optical components, Diffraction, Light sources, Roentgenium, Sensors, Free space, Wave propagation, Light wave propagation, Diffraction gratings, Shearing interferometers

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PROCEEDINGS ARTICLE | September 26, 2007

Microlens laser beam homogenizer: from theory to application

Proc. SPIE. 6663, Laser Beam Shaping VIII

KEYWORDS: Diffraction, Light sources, Eye, Homogenization, Microlens array, Diffusers, Microlens, Excimer lasers, Spherical lenses, Beam homogenizers

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PROCEEDINGS ARTICLE | April 28, 2006

Characterization of cylindrical microlenses in transmitted light and with grazing incidence interferometry in reflected light

Proc. SPIE. 6188, Optical Micro- and Nanometrology in Microsystems Technology

KEYWORDS: Diffraction, Beam splitters, Diffractive optical elements, Spatial frequencies, Lenses, Interferometers, Interferometry, Wavefronts, CCD cameras, Grazing incidence

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High numerical aperture cylindrical micro-lenses are needed in collimating the laser light from laser bars in the near infrared. Diffraction limited performance of such collimation lenses can only be obtained if the surface shape deviates strongly from circular symmetry. Therefore, null tests make the use of diffractive optical elements (DOE) necessary. For performance test at the design wavelength the reference DOE produces an ideal cylinder wave which enables the compensation of the wave front coming from the micro-lens to a plane wave. The use of a DOE-master enables beside the null test geometry also a removal of the anamorphic distortion due to the cylinder geometry. The DOEs having a numerical aperture of 0.8 are produced on an e-beam machine. The measurement of the wave aberrations is done with the help of the phase shifting technique. Alignment aberrations are eliminated by a least square fit of suitable misalignment functionals derived from an analytic approximation. The shape of the micro-lenses is tested in reflected light showing surface defects directly. The cylinder symmetry allows for a grazing incidence test using two DOE with nearly constant spatial frequency. There are no limitations concerning the test of high numerical aperture surfaces since the structure of the diffractive elements are parallel curves to the profile curve. The mean spatial frequency of the DOE defines the effective wavelength. Since we use a diffractive interferometer the effective wavelength is identical to the pitch of the DOE. Usually pitches between 4-10 μm are used resulting in a fringe sensitivity of 2-5 Μm. The test delivers the deviation of the surface from the ideal form. In the case of non-circular symmetry the DOE deviates from the axicon type DOE. In addition to the shape deviations also the radius of curvature at the vertex can be measured. The stage for the cylindrical micro-lens is equipped with a length measuring device using grating references from Renishaw providing a length increment of 0.1μm. With the axicon DOE there are two positions where nearly fluffed out fringes can be observed. Starting from the basic test position the lens can be moved until the vertex of the lens coincides with the focal line of the wave generated by the central part of the DOE. The distance between these two positions gives the radius of curvature for the vertex. Modern manufacturing of micro-lenses comprises also hot embossing in plastics or even into glass. Because of the small dimensions of the lenses and the required accuracy of the surface shape also tests of the impressing mould have to be carried out. The DOE approach enables also the test of the embossing form with the same sensitivity as the final test of the lens. Measuring results for the two test methods will be given.

PROCEEDINGS ARTICLE | October 4, 2005

Benchmark for optical simulation tools in the European Network of Excellence on Micro-Optics NEMO

Proc. SPIE. 5962, Optical Design and Engineering II

KEYWORDS: GRIN lenses, Modeling, Gaussian beams, Diffractive optical elements, Wave propagation, Micro optics, Microlens, Optical simulations, Spherical lenses, Beam propagation method

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PROCEEDINGS ARTICLE | February 14, 2005

Diffractive lateral-shearing interferometer for phase-shift mask measurement using an excimer laser source

Proc. SPIE. 5776, Eighth International Symposium on Laser Metrology

KEYWORDS: Diffraction, Light sources, Interferometers, Wavefronts, Photomasks, Excimer lasers, Phase measurement, Phase shifts, Diffraction gratings, Shearing interferometers

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PROCEEDINGS ARTICLE | September 1, 2004

Homogenization and beam shaping with microlens arrays

Proc. SPIE. 5456, Photon Management

KEYWORDS: Lithography, Diffraction, Light sources, Light emitting diodes, Homogenization, Microlens array, Sensors, Microlens, Spatial coherence, Beam shaping

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PROCEEDINGS ARTICLE | December 22, 2003

Null test measurement of high-numerical-aperture cylindrical microlenses in transmitted light

Proc. SPIE. 5180, Optical Manufacturing and Testing V

KEYWORDS: Near infrared, Diffraction, Diffractive optical elements, Lenses, Interferometers, Etching, Wavefront sensors, Wavefronts, Semiconductor lasers, CCD cameras

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PROCEEDINGS ARTICLE | November 19, 2003

Characterization of cylindrical lenses with the help of grazing incidence interferometry for micro- and macro-optics

Proc. SPIE. 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life

KEYWORDS: Diffraction, Beam splitters, Diffractive optical elements, Spatial frequencies, Interferometers, Interferometry, Beam shaping, Cylindrical lenses, Grazing incidence, Laser beam diagnostics

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PROCEEDINGS ARTICLE | July 30, 2002

Lateral shearing interferometer for phase-shift mask measurement at 193 nm

Proc. SPIE. 4691, Optical Microlithography XV

KEYWORDS: Superposition, Diffraction, Light sources, Interferometers, Wavefronts, Photomasks, Phase measurement, Phase shifts, Diffraction gratings, Shearing interferometers

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SPIE Journal Paper | February 1, 2002

Experimental results for expanding the dynamic range of a Shack-Hartmann sensor by using astigmatic microlenses

Lindlein, Norbert , Pfund, Johannes

OE Vol. 41 Issue 02

KEYWORDS: Sensors, Wavefront sensors, Microlens, Wavefronts, Microlens array, Interferometry, Zernike polynomials, Optical engineering, Spherical lenses, Detector arrays

PROCEEDINGS ARTICLE | December 13, 2001

Optical measurement methods for refractive microlenses and arrays

Proc. SPIE. 4455, Micro- and Nano-optics for Optical Interconnection and Information Processing

KEYWORDS: Microlens array, Mach-Zehnder interferometers, Diffractive optical elements, Lenses, Interferometers, Optical testing, Objectives, Microlens, Grazing incidence, Spherical lenses

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PROCEEDINGS ARTICLE | November 13, 2001

Design and modeling of a miniature system containing micro-optics

Proc. SPIE. 4437, Gradient Index, Miniature, and Diffractive Optical Systems II

KEYWORDS: Optical components, Diffraction, Gaussian beams, Microlens array, Wavefronts, Wave propagation, Refraction, Ray tracing, Beam propagation method, Systems modeling

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PROCEEDINGS ARTICLE | November 9, 2001

Interferometrical measurement of cylindrical lenses with the help of computer-generated holograms

Proc. SPIE. 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication

KEYWORDS: Diffraction, Diffractive optical elements, Interferometers, Interferometry, Wavefronts, Lens design, Computer generated holography, Aspheric lenses, Cylindrical lenses, Grazing incidence

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SPIE Journal Paper | May 1, 2001

Algorithm for expanding the dynamic range of a Shack-Hartmann sensor by using a spatial light modulator

Lindlein, Norbert , Pfund, Johannes , Schwider, Johannes

OE Vol. 40 Issue 05

KEYWORDS: Switching, Sensors, Wavefront sensors, Spatial light modulators, Wavefronts, Switches, Microlens array, Lenses, Binary data, Microlens

SPIE Journal Paper | August 1, 2000

Expansion of the dynamic range of a Shack-Hartmann sensor by using astigmatic microlenses

Lindlein, Norbert , Pfund, Johannes , Schwider, Johannes

OE Vol. 39 Issue 08

KEYWORDS: Microlens, Sensors, Wavefronts, Lenses, Monochromatic aberrations, Wavefront sensors, Spherical lenses, Microlens array, Optical engineering, Glasses

PROCEEDINGS ARTICLE | July 19, 1999

Aspherical surface testing by using spherical compensation

Proc. SPIE. 3749, 18th Congress of the International Commission for Optics

KEYWORDS: Telescopes, Sensors, Interferometry, Wavefront sensors, Wavefronts, Optical testing, Computer generated holography, Aspheric lenses, Reconstruction algorithms, Spherical lenses

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PROCEEDINGS ARTICLE | September 29, 1998

Measurement devices with and for micro-optics at the University of Erlangen

Proc. SPIE. 3407, International Conference on Applied Optical Metrology

KEYWORDS: Confocal microscopy, Microscopes, Microlens array, Optical spheres, Interferometers, Wavefront sensors, Wavefronts, Microlens, Measurement devices, Spherical lenses

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SPIE Journal Paper | June 1, 1998

Simulation of micro-optical array systems with RAYTRACE

Lindlein, Norbert , Simon, Frank , Schwider, Johannes

OE Vol. 37 Issue 06

KEYWORDS: Chemical elements, Microlens array, Ray tracing, Wave propagation, Diffraction, Optical components, Optical design, Wavefront sensors, Light sources, Sensors

SPIE Journal Paper | April 1, 1997

Fractional Talbot effect for periodic microlens arrays

Besold, Brigitte , Lindlein, Norbert

OE Vol. 36 Issue 04

KEYWORDS: Microlens array, Lenses, Microlens, Spatial frequencies, Numerical simulations, Optical engineering, Wave propagation, Sodium, Convolution, Fourier transforms

SPIE Journal Paper | July 1, 1996

Diffraction-limited holographic lenses in dichromated gelatine

Falkenstoerfer, Oliver , Lindlein, Norbert , Keinonen, Tuula , Schwider, Johannes

OE Vol. 35 Issue 07

KEYWORDS: Holography, Lenses, Computer generated holography, Aspheric lenses, Spherical lenses, Diffraction, Holographic optical elements, Wavefronts, Interferometers, Interferometry

PROCEEDINGS ARTICLE | October 12, 1994

Iterative correction of holographic lenses

Proc. SPIE. 2169, Nonconventional Optical Imaging Elements

KEYWORDS: Optical components, Diffraction, Holographic optical elements, Holography, Lenses, Computer generated holography, Ray tracing, Aspheric lenses, Spherical lenses, Optics manufacturing

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SPIE Journal Paper | August 1, 1994

Characterization of microlenses using a phase-shifting shearing interferometer

Sickinger, Horst , Falkenstoerfer, Oliver , Lindlein, Norbert , Schwider, Johannes

OE Vol. 33 Issue 08

KEYWORDS: Wavefronts, Shearing interferometers, Mirrors, Microlens, Interferometry, Phase shifts, Phase measurement, Molybdenum, Interferometers, Ferroelectric materials

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PROCEEDINGS ARTICLE | June 17, 1994

Achromatic diffractive fan-out systems

Proc. SPIE. 2152, Diffractive and Holographic Optics Technology

KEYWORDS: Optical components, Diffraction, Optical design, Fluctuations and noise, Diffractive optical elements, Lenses, Wavefronts, Microlens, Contact lenses, Diffraction gratings

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PROCEEDINGS ARTICLE | December 15, 1993

Production and control of refractive and diffractive microlenses

Proc. SPIE. 1992, Miniature and Micro-Optics and Micromechanics

KEYWORDS: Microscopes, Diffraction, Lenses, Interferometers, Wavefronts, Photoresist materials, Computer generated holography, Microlens, Photomasks, Spherical lenses

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