Norhayati Soin
at Univ Malaya
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 4 January 2006
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Microelectromechanical systems, Sensors, Etching, Crystals, Silicon, Scanning electron microscopy, Photomasks, Computer aided design, Semiconducting wafers, Anisotropic etching

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