Prof. Noriaki Miyanaga Profile

Prof. Noriaki Miyanaga

Professor at Osaka Univ

SPIE Involvement:

Conference Program Committee | Author

Publications (55)

PROCEEDINGS ARTICLE | February 27, 2017

Beam shaping by spatial light modulator and 4f system to square and top-flat for interference laser processing

Proc. SPIE. 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII

KEYWORDS: Fabrication, Optical filters, Femtosecond phenomena, Spatial frequencies, Spatial filters, Signal attenuation, Laser processing, Phase shift keying, Spatial light modulators, Beam shaping

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PROCEEDINGS ARTICLE | August 9, 2016

Source of contamination in damage-test sample and vacuum

Proc. SPIE. 9983, Pacific Rim Laser Damage 2016: Optical Materials for High-Power Lasers

KEYWORDS: Optical components, Mirrors, Polishing, Contamination, Laser induced damage, Ultraviolet radiation, High power lasers, Dielectrics, Coating, Optical coatings, Humidity, Laser damage threshold, Pulsed laser operation, Surface finishing, Laser systems engineering

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PROCEEDINGS ARTICLE | July 22, 2016

Ion-assisted coating for large-scale Bimorph deformable mirror

Proc. SPIE. 9983, Pacific Rim Laser Damage 2016: Optical Materials for High-Power Lasers

KEYWORDS: Actuators, Mirrors, Polishing, Interferometers, Laser induced damage, Laser induced damage, Coating, Deformable mirrors, Deformable mirrors, Laser damage threshold, Laser damage threshold, Surface finishing, Laser systems engineering

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PROCEEDINGS ARTICLE | May 1, 2015

World's largest high energy petawatt laser LFEX as a user's facility

Proc. SPIE. 9515, Research Using Extreme Light: Entering New Frontiers with Petawatt-Class Lasers II

KEYWORDS: Fiber amplifiers, Mirrors, Optical amplifiers, Laser energy, Physics, Laser irradiation, Picosecond phenomena, Pulsed laser operation, Fusion energy, Diffraction gratings

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PROCEEDINGS ARTICLE | September 22, 2014

Progress in research on laser damage mechanisms and contamination problem

Proc. SPIE. 9238, Pacific Rim Laser Damage 2014: Optical Materials for High-Power Lasers

KEYWORDS: Mirrors, Contamination, Silica, Laser induced damage, Dielectrics, Nitrogen, Optical coatings, Pulsed laser operation, Temperature metrology, Laser systems engineering

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PROCEEDINGS ARTICLE | February 28, 2014

180W at 1kHz, 532nm SHG from LBO crystals using high average power Nd:YAG laser

Proc. SPIE. 8959, Solid State Lasers XXIII: Technology and Devices

KEYWORDS: Second-harmonic generation, Oscillators, Crystals, Laser processing, Laser applications, Nd:YAG lasers, Amplifiers, Semiconductor lasers, Laser crystals, Laser systems engineering

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PROCEEDINGS ARTICLE | February 28, 2014

400W Nd:YAG composite ceramic thin-disc laser in 10ns pulse at 167kHz

Proc. SPIE. 8959, Solid State Lasers XXIII: Technology and Devices

KEYWORDS: Fiber amplifiers, Optical amplifiers, Ceramics, Laser processing, Laser applications, Nd:YAG lasers, Amplifiers, Fiber lasers, Pulsed laser operation, Prototyping

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PROCEEDINGS ARTICLE | July 19, 2013

Recent progresses on insights of laser damage mechanisms and influence of contamination in optics

Proc. SPIE. 8786, Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers

KEYWORDS: Optical components, Mirrors, Contamination, Laser induced damage, Dielectrics, Laser applications, Optical coatings, Pulsed laser operation, Temperature metrology, Laser systems engineering

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PROCEEDINGS ARTICLE | March 6, 2013

Development of kW class Nd:YAG composite ceramic thin disc laser

Proc. SPIE. 8599, Solid State Lasers XXII: Technology and Devices

KEYWORDS: Fiber amplifiers, Optical amplifiers, Ceramics, Composites, Laser processing, Laser applications, Nd:YAG lasers, Amplifiers, Distortion, Fiber coupled lasers

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PROCEEDINGS ARTICLE | December 4, 2012

Influences of oil-contamination on LIDT and optical properties in dielectric coatings

Proc. SPIE. 8530, Laser-Induced Damage in Optical Materials: 2012

KEYWORDS: Mirrors, Contamination, Silica, Optical properties, Metals, Laser induced damage, Dielectrics, Nitrogen, Optical coatings, Dielectric mirrors

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PROCEEDINGS ARTICLE | February 16, 2012

Generation of new nanostructures in designed matrix by interfering femtosecond laser processing

Proc. SPIE. 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII

KEYWORDS: Metamaterials, Nanostructures, Femtosecond phenomena, Metals, Laser processing, Optical simulations, Double patterning technology, Structural design, Nanolithography, Phase shifts

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PROCEEDINGS ARTICLE | February 22, 2011

Generation of complicated or duplicated structure by interfering femtosecond laser processing of metallic thin film

Proc. SPIE. 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI

KEYWORDS: Thin films, Nanostructures, Femtosecond phenomena, Diffractive optical elements, Laser processing, Optical simulations, Double patterning technology, Pulsed laser operation, Laser engineering, Phase shifts

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PROCEEDINGS ARTICLE | February 22, 2011

Generation of superfine structure smaller than 10 nm by interfering femtosecond laser processing

Proc. SPIE. 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI

KEYWORDS: Gold, Metamaterials, Thin films, Beam splitters, Femtosecond phenomena, Laser irradiation, Sapphire, Thin film deposition, Liquids, Phase shifts

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PROCEEDINGS ARTICLE | December 6, 2010

Oil-contamination problem in large-scale pulse-compressor

Proc. SPIE. 7842, Laser-Induced Damage in Optical Materials: 2010

KEYWORDS: Optical components, Mirrors, Contamination, Silica, Laser induced damage, Photography, Laser applications, Optical coatings, Laser damage threshold, Pulsed laser operation

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PROCEEDINGS ARTICLE | February 18, 2010

Effect of target structure on interfering femtosecond laser processing

Proc. SPIE. 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV

KEYWORDS: Gold, Thin films, Beam splitters, Femtosecond phenomena, Silica, Glasses, Silver, Laser processing, Scanning electron microscopy, Thin film deposition

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PROCEEDINGS ARTICLE | February 17, 2010

Thermal effect of cryogenic Yb:YAG total-reflection active-mirror laser

Proc. SPIE. 7578, Solid State Lasers XIX: Technology and Devices

KEYWORDS: Luminescence, Ceramics, Composites, Nitrogen, Laser applications, Thermal effects, Laser optics, Cryogenics, Temperature metrology, Liquids

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PROCEEDINGS ARTICLE | April 22, 2009

Harmonics generation in VUV spectral region driven by a NIR Ti:sapphire laser in rare gases

Proc. SPIE. 7131, XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers

KEYWORDS: Near infrared, Argon, Spectroscopy, Gases, Xenon, Gas lasers, Sapphire lasers, Excimers, Harmonic generation, Vacuum ultraviolet

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PROCEEDINGS ARTICLE | April 22, 2009

OFI argon excimer amplifier for intense subpicosecond VUV pulse generation

Proc. SPIE. 7131, XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers

KEYWORDS: Reflectors, Mirrors, Optical amplifiers, Argon, Excimer lasers, Sapphire lasers, Excimers, Vacuum ultraviolet, Plasma, Laser systems engineering

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PROCEEDINGS ARTICLE | February 25, 2009

Low-stress dicing assisted by pulsed laser for multilayer MEMS

Proc. SPIE. 7202, Laser-based Micro- and Nanopackaging and Assembly III

KEYWORDS: Microelectromechanical systems, Glasses, Silicon, Laser applications, Carbon dioxide lasers, Fiber lasers, Semiconductor lasers, Neodymium lasers, Semiconducting wafers, Pulsed laser operation

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PROCEEDINGS ARTICLE | February 24, 2009

Generation of nanostructured surfaces by interfering and no-interfering ultra-short pulse laser processing

Proc. SPIE. 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII

KEYWORDS: Gold, Thin films, Nanostructures, Beam splitters, Femtosecond phenomena, Crystals, Silicon, Laser processing, Picosecond phenomena, Pulsed laser operation

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PROCEEDINGS ARTICLE | February 20, 2009

OFI rare-gas excimer amplifier for high-intensity VUV pulse generation

Proc. SPIE. 7196, High Energy/Average Power Lasers and Intense Beam Applications III

KEYWORDS: Reflectors, Mirrors, Optical amplifiers, Argon, Xenon, Excimers, Harmonic generation, Vacuum ultraviolet, Pulsed laser operation, Plasma

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PROCEEDINGS ARTICLE | April 1, 2008

Low density targets for laser-produced-plasma (LPP) extreme ultraviolet light source with high-CE and toward high-repletion supply

Proc. SPIE. 6921, Emerging Lithographic Technologies XII

KEYWORDS: Lithium, Foam, Particles, Bioalcohols, Scanning electron microscopy, Xenon, Liquid crystals, Extreme ultraviolet, Liquids, Tin

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PROCEEDINGS ARTICLE | March 21, 2008

Characterization of extreme ultraviolet emission from tin-droplets irradiated with Nd:YAG laser plasmas

Proc. SPIE. 6921, Emerging Lithographic Technologies XII

KEYWORDS: Optical spheres, Databases, Laser energy, Plasmas, Nd:YAG lasers, Extreme ultraviolet, Plasma generation, Spherical lenses, Signal detection, Pulsed laser operation

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PROCEEDINGS ARTICLE | March 20, 2008

Advanced laser-produced EUV light source for HVM with conversion efficiency of 5-7% and B-field mitigation of ions

Proc. SPIE. 6921, Emerging Lithographic Technologies XII

KEYWORDS: Light sources, Etching, Sputter deposition, Ions, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Pulsed laser operation, Plasma, Tin

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PROCEEDINGS ARTICLE | February 21, 2008

High-intensity subpicosecond vacuum ultraviolet laser system

Proc. SPIE. 6874, High Energy/Average Power Lasers and Intense Beam Applications II

KEYWORDS: Optical amplifiers, Argon, Laser development, Infrared lasers, Xenon, Ionization, Infrared radiation, Krypton, Vacuum ultraviolet, Plasma

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PROCEEDINGS ARTICLE | February 14, 2007

Subpicosecond vacuum ultraviolet laser system for advanced materials processing

Proc. SPIE. 6452, Laser Resonators and Beam Control IX

KEYWORDS: Mirrors, Optical amplifiers, Argon, Silicon, Laser processing, Lamps, Excimers, Vacuum ultraviolet, Plasma, Laser systems engineering

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PROCEEDINGS ARTICLE | March 24, 2006

Energy spectra and charge state of debris emitted from laser-produced minimum mass tin plasmas

Proc. SPIE. 6151, Emerging Lithographic Technologies X

KEYWORDS: Mirrors, Light sources, Opacity, Chemical species, Ions, Plasmas, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Tin

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PROCEEDINGS ARTICLE | March 23, 2006

Progress in LPP EUV source development at Osaka University

Proc. SPIE. 6151, Emerging Lithographic Technologies X

KEYWORDS: Opacity, Ions, Laser development, Nd:YAG lasers, Extreme ultraviolet, YAG lasers, Pulsed laser operation, Plasma, Tin, Absorption

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PROCEEDINGS ARTICLE | February 23, 2006

Development of thermally controlled HALNA DPSSL for inertial fusion energy

Proc. SPIE. 6101, Laser Beam Control and Applications

KEYWORDS: Cladding, Glasses, High power lasers, Amplifiers, Thermal effects, Laser glasses, Pulsed laser operation, Laser systems engineering, Fusion energy, Absorption

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PROCEEDINGS ARTICLE | May 6, 2005

Estimations on high energy ions and neutral particles from LPP EUV light sources

Proc. SPIE. 5751, Emerging Lithographic Technologies IX

KEYWORDS: Light sources, Particles, Ions, Plasmas, Laser development, Laser ablation, Xenon, Ionization, Extreme ultraviolet, Optical simulations

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PROCEEDINGS ARTICLE | May 6, 2005

Target fabrication of low-density and nanoporous tin oxide as laser targets to generate extreme ultraviolet

Proc. SPIE. 5751, Emerging Lithographic Technologies IX

KEYWORDS: Oxides, Optical spheres, Crystals, Composites, Scanning electron microscopy, Liquid crystals, Extreme ultraviolet, Plasma, Liquids, Tin

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PROCEEDINGS ARTICLE | May 6, 2005

Evaluation of tin-foil targets for debris mitigation in laser generated EUV source

Proc. SPIE. 5751, Emerging Lithographic Technologies IX

KEYWORDS: Foam, Cameras, Particles, Ions, Plasmas, Nd:YAG lasers, Xenon, Extreme ultraviolet, Pulsed laser operation, Tin

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PROCEEDINGS ARTICLE | May 6, 2005

Properties of EUV and particle generations from laser-irradiated solid- and low-density tin targets

Proc. SPIE. 5751, Emerging Lithographic Technologies IX

KEYWORDS: Mirrors, Opacity, Particles, Ions, Plasmas, Laser ablation, Extreme ultraviolet, Pulsed laser operation, EUV optics, Tin

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PROCEEDINGS ARTICLE | September 20, 2004

Dependence of EUV emission properties on laser wavelength

Proc. SPIE. 5448, High-Power Laser Ablation V

KEYWORDS: Lithography, Opacity, Laser energy, Laser applications, Extreme ultraviolet, Optical simulations, Excimer lasers, Plasma, Tin, Absorption

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PROCEEDINGS ARTICLE | May 20, 2004

Experimental study on basic properties of laser-produced EUV plasmas on GEKKO-XII laser facility

Proc. SPIE. 5374, Emerging Lithographic Technologies VIII

KEYWORDS: Optical filters, Opacity, X-rays, Plasmas, Laser irradiation, Laser ablation, Extreme ultraviolet, Aluminum, Pulsed laser operation, Tin

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PROCEEDINGS ARTICLE | May 20, 2004

Estimation of emission efficiency for laser-produced EUV plasmas

Proc. SPIE. 5374, Emerging Lithographic Technologies VIII

KEYWORDS: Opacity, X-rays, Electrons, Ions, Plasmas, Laser development, Solids, Extreme ultraviolet, Pulsed laser operation, Tin

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PROCEEDINGS ARTICLE | May 20, 2004

Properties of EUV emissions from laserproduced tin plasmas

Proc. SPIE. 5374, Emerging Lithographic Technologies VIII

KEYWORDS: Lithography, Calibration, Spectroscopy, Laser energy, Plasmas, Laser applications, Extreme ultraviolet, Grazing incidence, Spherical lenses, Tin

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PROCEEDINGS ARTICLE | January 7, 2004

Study on EUV emission properties of laser-produced plasma at ILE, Osaka

Proc. SPIE. 5196, Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications

KEYWORDS: Data modeling, Opacity, X-rays, Laser applications, Laser ablation, Extreme ultraviolet, Spherical lenses, Plasma, Laser systems engineering, Tin

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PROCEEDINGS ARTICLE | April 23, 2001

Model experiments of fast ignition with coaxial high-power laser beams

Proc. SPIE. 4424, ECLIM 2000: 26th European Conference on Laser Interaction with Matter

KEYWORDS: High power lasers, X-rays, Spectrometers, Laser drilling, Solids, Picosecond phenomena, X-ray imaging, Pulsed laser operation, Plasma, Fusion energy

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PROCEEDINGS ARTICLE | April 17, 2001

Ultrafast one- and two-dimensional x-ray imaging by use of x-ray streak cameras with one- and two-dimensional image-sampling technique

Proc. SPIE. 4183, 24th International Congress on High-Speed Photography and Photonics

KEYWORDS: Image fusion, Moire patterns, X-rays, Plasmas, Temporal resolution, Streak cameras, Picosecond phenomena, Spatial resolution, X-ray imaging, Ultrafast imaging

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PROCEEDINGS ARTICLE | April 3, 2000

Calculation on self-focusing of amplified partially coherent light with peaky electric field

Proc. SPIE. 3889, Advanced High-Power Lasers

KEYWORDS: Diffraction, Refractive index, Optical amplifiers, Modulation, Silica, Speckle, Glasses, Laser damage threshold, Picosecond phenomena, Laser glasses

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PROCEEDINGS ARTICLE | January 11, 2000

Ultra-intense laser propagation with measurement of backscattered light image and spectrum

Proc. SPIE. 3886, High-Power Lasers in Energy Engineering

KEYWORDS: Optical fibers, Spectroscopy, Laser scattering, Laser beam propagation, Optical testing, CCD cameras, Spectral resolution, Cavitation, Pulsed laser operation, Plasma

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PROCEEDINGS ARTICLE | January 11, 2000

X-ray spectroscopic analysis of the influence of low-modal nonuniformity on the formation of a hot spark

Proc. SPIE. 3886, High-Power Lasers in Energy Engineering

KEYWORDS: Spectrum analysis, Argon, Spectroscopy, X-rays, Diagnostics, Laser irradiation, Picosecond phenomena, X-ray imaging, Plasma, Fusion energy

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PROCEEDINGS ARTICLE | January 11, 2000

Indirect/direct hybrid drive implosion experiments with x-ray pre-irradiation

Proc. SPIE. 3886, High-Power Lasers in Energy Engineering

KEYWORDS: Gold, Laser energy, X-rays, X-ray sources, Laser irradiation, Thermal effects, Beam shaping, Picosecond phenomena, X-ray imaging, Plasma

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PROCEEDINGS ARTICLE | January 11, 2000

Observation of low-mode implosion nonuniformity of plastic-shell targets in the acceleration phase

Proc. SPIE. 3886, High-Power Lasers in Energy Engineering

KEYWORDS: Rockets, Optical spheres, Glasses, X-rays, Laser ablation, Sapphire, X-ray imaging, Laser glasses, Pulsed laser operation, Plasma

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PROCEEDINGS ARTICLE | July 23, 1999

Design of kinoform phase plate for irradiating spherical target

Proc. SPIE. 3492, Third International Conference on Solid State Lasers for Application to Inertial Confinement Fusion

KEYWORDS: Energy efficiency, Composites, Lens design, Computer generated holography, Near field diffraction, Deconvolution, Reconstruction algorithms, Spherical lenses, Laser engineering, Phase shifts

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PROCEEDINGS ARTICLE | July 23, 1999

Progress of direct drive laser fusion research at ILE, Osaka

Proc. SPIE. 3492, Third International Conference on Solid State Lasers for Application to Inertial Confinement Fusion

KEYWORDS: Laser welding, Solid state lasers, Plasma, Laser systems engineering

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PROCEEDINGS ARTICLE | September 14, 1998

Development of the diode-pumped solid state laser and its application to laser fusion and industry

Proc. SPIE. 3343, High-Power Laser Ablation

KEYWORDS: Optical amplifiers, High power lasers, Laser applications, Laser development, Laser welding, Solid state lasers, Physics, Semiconductor lasers, Fusion energy, Diode pumped solid state lasers

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PROCEEDINGS ARTICLE | December 8, 1997

Development of a liquid crystal polarization control plate aligned by photoisomerization of azo dye

Proc. SPIE. 3047, Solid State Lasers for Application to Inertial Confinement Fusion: Second Annual International Conference

KEYWORDS: Polarization, Speckle, Polymers, Ultraviolet radiation, Molecules, Speckle pattern, Liquid crystals, Laser damage threshold, Polarization control, Absorption

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PROCEEDINGS ARTICLE | December 8, 1997

Smoothing of focused-beam pattern using two-dimensional spectral dispersion performed at GEKKO XII

Proc. SPIE. 3047, Solid State Lasers for Application to Inertial Confinement Fusion: Second Annual International Conference

KEYWORDS: Optical fibers, Phase modulation, Modulation, Glasses, Crystals, Phase shift keying, Modulators, Microwave radiation, Laser glasses, Spherical lenses

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PROCEEDINGS ARTICLE | December 8, 1995

Flexible pulse shaping of partially coherent light on GEKKO XII

Proc. SPIE. 2633, Solid State Lasers for Application to Inertial Confinement Fusion (ICF)

KEYWORDS: Multimode fibers, Optical fibers, Mirrors, Optical amplifiers, Fiber optics, Single mode fibers, Attenuators, Pulse shaping, Picosecond phenomena, Diffraction gratings

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PROCEEDINGS ARTICLE | December 8, 1995

Improvement of laser irradiation uniformity in GEKKO XII glass laser system

Proc. SPIE. 2633, Solid State Lasers for Application to Inertial Confinement Fusion (ICF)

KEYWORDS: Phase modulation, Modulation, Glasses, Optical testing, Laser irradiation, Picosecond phenomena, Laser glasses, Spherical lenses, Laser systems engineering, Absorption

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PROCEEDINGS ARTICLE | May 1, 1993

Evaluation of irradiation uniformity on spherical target using angularly dispersed, partially coherent light in direct-drive laser fusion

Proc. SPIE. 1870, Laser Coherence Control: Technology and Applications

KEYWORDS: Diffraction, Speckle, Laser welding, Optical testing, Speckle pattern, Near field, Spherical lenses, Laser systems engineering, Visibility, Light

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PROCEEDINGS ARTICLE | May 1, 1993

Partially coherent light sources for ICF experiment

Proc. SPIE. 1870, Laser Coherence Control: Technology and Applications

KEYWORDS: Multimode fibers, Light sources, Statistical analysis, Polarization, Speckle, Crystals, Amplifiers, Speckle pattern, Frequency conversion, Spherical lenses

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PROCEEDINGS ARTICLE | April 1, 1991

Beam control and power conditioning of GEKKO glass laser system

Proc. SPIE. 1411, Pulse Power for Lasers III

KEYWORDS: Optical amplifiers, Capacitors, Glasses, Lamps, Control systems, Laser amplifiers, Laser glasses, Pulsed laser operation, Beam controllers, Laser systems engineering

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Showing 5 of 55 publications

Conference Committee Involvement (5)

High Power Lasers for Fusion Research V

6 February 2019 | San Francisco, California, United States

High Power Lasers for Fusion Research IV

30 January 2017 | San Francisco, California, United States

High Power Lasers for Fusion Research III

11 February 2015 | San Francisco, California, United States

High-Power Lasers for Fusion Research II

7 February 2013 | San Francisco, California, United States

High Power Lasers for Fusion Research

26 January 2011 | San Francisco, California, United States

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