Norihiro Yamamoto
Sr. Manager Engineering
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 26 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Lithography, Apodization, Reticles, Jones matrices, Polarization, Matrices, Pellicles, Zernike polynomials, Transmittance, Critical dimension metrology

Proceedings Article | 21 March 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Diffraction, Refractive index, Lithographic illumination, Polarization, Optical testing, Photomasks, Critical dimension metrology, Binary data, Mineralogy, Phase shifts

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