Ms. Noriko Yamashita Profile

Noriko Yamashita

at FUJIFILM Corp

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 25 September 2010

Duplicated templates for discrete track media

Atsushi Tatsugawa, Noriko Yamashita, Tadashi Oomatsu, Kenji Saitou, Takashi Katou, Toshihide Ishioka, Kazuyuki Usuki

Proc. SPIE. 7823, Photomask Technology 2010

KEYWORDS: Quartz, Ultraviolet radiation, Nickel, Silicon, Photomasks, Line width roughness, Servomechanisms, Nanoimprint lithography, Reactive ion etching, Semiconducting wafers

Read Abstract +

Proceedings Article | 23 September 2009

Duplicated quartz template for 2.5 inch discrete track media

Noriko Yamashita, Tadashi Oomatsu, Satoshi Wakamatsu, Katsuhiro Nishimaki, Toshihiro Usa, Kazuyuki Usuki

Proc. SPIE. 7488, Photomask Technology 2009

KEYWORDS: Lithography, Etching, Quartz, Silicon, Resistance, Scanning electron microscopy, Photomasks, Nanoimprint lithography, Reactive ion etching, Photoresist processing

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years