Prof. Norio Nakamura
at High Energy Accelerator Research Organization KEK
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 12 October 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Near infrared, Electron beams, Light sources, Laser scanners, Extreme ultraviolet, Extreme ultraviolet lithography, 3D scanning, Free electron lasers, Stochastic processes

Proceedings Article | 16 October 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Semiconductors, Light sources, Superconductors, Extreme ultraviolet, Extreme ultraviolet lithography, Free electron lasers, EUV optics

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