Mr. Norizan Mohamad Profile

Norizan Mohamad

at Swinburne Univ of Technology

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Publications (2)

Proceedings Article | 30 December 2008 Paper

Effective diaphragm area of spring-supported capacitive MEMS microphone designs

Norizan Mohamad, Pio Iovenitti, Thurai Vinay

Proceedings Volume 7268, 726805 (2008) https://doi.org/10.1117/12.810575

KEYWORDS: Microelectromechanical systems, Capacitance, Capacitors, Numerical analysis, Fabrication, Silicon, Motion analysis, Analytical research, Dielectrics, Finite element methods

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Proceedings Article | 9 January 2008 Paper

High sensitivity capacitive MEMS microphone with spring supported diaphragm

Norizan Mohamad, Pio Iovenitti, Thurai Vinay

Proceedings Volume 6800, 68001T (2008) https://doi.org/10.1117/12.758987

KEYWORDS: Microelectromechanical systems, Silicon, Capacitance, Finite element methods, Scanning probe lithography, Numerical analysis, Semiconducting wafers, Mobile communications, Photomasks, Fabrication

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