Norizan Mohamad
at Swinburne Univ of Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 30 December 2008
Proc. SPIE. 7268, Smart Structures, Devices, and Systems IV
KEYWORDS: Fabrication, Microelectromechanical systems, Capacitors, Dielectrics, Silicon, Numerical analysis, Capacitance, Finite element methods, Analytical research, Motion analysis

Proceedings Article | 9 January 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Fabrication, Microelectromechanical systems, Silicon, Scanning probe lithography, Numerical analysis, Capacitance, Finite element methods, Photomasks, Semiconducting wafers, Mobile communications

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