Dr. Núria Barniol Beumala
at Univ Autònoma de Barcelona
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Data modeling, Sensors, Transducers, Computer aided design, Analog electronics, Performance modeling, Systems modeling, Device simulation, Solid modeling

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Readout integrated circuits, CMOS sensors, Optical lithography, Sensors, Transducers, Photomasks, Integrated circuits, Reactive ion etching, Integrated circuit design

Proceedings Article | 30 June 2005
Proc. SPIE. 5837, VLSI Circuits and Systems II
KEYWORDS: Microelectromechanical systems, Readout integrated circuits, Resonators, Amplifiers, Transistors, Integrated circuits, CMOS technology, Integrated circuit design, Device simulation, Network security

Proceedings Article | 29 April 2003
Proc. SPIE. 5118, Nanotechnology
KEYWORDS: Oxides, Nanostructures, Silicon, Atomic force microscopy, Photomasks, Aluminum, Nanoelectromechanical systems, Prototyping, Nanolithography, Oxidation

Proceedings Article | 24 April 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Oxides, Sensors, Etching, Silicon, Photomasks, Aluminum, Semiconducting wafers, Nanoelectromechanical systems, Nanofabrication, Nanolithography

Showing 5 of 6 publications
Conference Committee Involvement (1)
Nanotechnology
2 May 2007 | Maspalomas, Gran Canaria, Spain
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