Oded Cohen
at Nova Measuring Instruments Ltd
SPIE Involvement:
Author
Publications (22)

PROCEEDINGS ARTICLE | March 29, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Multilayers, Metrology, Optical lithography, Metals, Germanium, Gallium arsenide, Silicon, Scatterometry, Semiconducting wafers, Nanowires

PROCEEDINGS ARTICLE | March 24, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Lithography, Metrology, Optical lithography, Diffractive optical elements, Etching, Scatterometry, Process control, Critical dimension metrology, Semiconducting wafers, Scatter measurement

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Metrology, Optical lithography, Defect detection, Inspection, Image analysis, Scanning electron microscopy, Scatterometry, Process control, Directed self assembly, Semiconducting wafers

PROCEEDINGS ARTICLE | February 25, 2008
Proc. SPIE. 6898, Silicon Photonics III
KEYWORDS: Fabry–Perot interferometers, Methane, Waveguides, Silicon, Semiconductor lasers, Raman spectroscopy, Diodes, Laser damage threshold, Silicon photonics, Absorption

PROCEEDINGS ARTICLE | February 14, 2008
Proc. SPIE. 6892, Ultrafast Phenomena in Semiconductors and Nanostructure Materials XII
KEYWORDS: Eye, Waveguides, Dispersion, Silicon, Signal processing, Nonlinear optics, Optical communications, Optical proximity correction, Dense wavelength division multiplexing, Absorption

PROCEEDINGS ARTICLE | February 13, 2008
Proc. SPIE. 6898, Silicon Photonics III
KEYWORDS: Photodetectors, Polishing, Quantum wells, Resonators, Waveguides, Sensors, Silicon, Semiconductor lasers, Laser resonators, Laser damage threshold

Showing 5 of 22 publications
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