Mr. Odo Wunnicke
at Infineon Technologies AG
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 24, 2002
Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX
KEYWORDS: Statistical analysis, Polymers, Interfaces, Surface roughness, Atomic force microscopy, Scanning electron microscopy, Surface properties, Line edge roughness, Polymer thin films, Liquids

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top