Dr. Odysseas Zografos
at imec
SPIE Involvement:
Publications (9)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12954, 129540E (2024) https://doi.org/10.1117/12.3010149
KEYWORDS: Semiconductor manufacturing, Back end of line, Logic, Front end of line

Proceedings Article | 10 April 2024 Presentation + Paper
Halil Kükner, Gioele Mirabelli, Sheng Yang, Yun Zhou, Alexander Makarov, Yang Xiang, Juergen Boemmels, Anabela Veloso, Odysseas Zografos, Pieter Weckx, Julien Ryckaert, Geert Hellings
Proceedings Volume 12954, 1295409 (2024) https://doi.org/10.1117/12.3010866
KEYWORDS: Nanosheets, Design, Logic, Electronic design automation, Oscillators, Silicon, CMOS devices, Digital electronic circuits

Proceedings Article | 10 April 2024 Presentation + Paper
Hsinlan Chang, Youssef Drissi, Gioele Mirabelli, Odysseas Zografos, Yasser Sherazi, Julien Ryckaert, Gaspard Hiblot
Proceedings Volume 12953, 129530Y (2024) https://doi.org/10.1117/12.3010804
KEYWORDS: Extreme ultraviolet, Printing, Optical lithography, Extreme ultraviolet lithography, Metals, Transistors, Optical proximity correction, Deep ultraviolet

Proceedings Article | 28 April 2023 Poster + Paper
G. Mirabelli, A. Vandooren, C. Roda Neve, V. Gonzalez, H. Mertens, A. Farokhnejad, P. Schuddinck, G. Murdoch, S. Salahuddin, O. Zografos, L. Ragnarsson, P. Weckx, Z. Tokei, G. Hellings, J. Ryckaert
Proceedings Volume 12495, 124951K (2023) https://doi.org/10.1117/12.2656456
KEYWORDS: Semiconducting wafers, Metals, Back end of line, Silver, Optical lithography, Transmission electron microscopy, Nanosheets, Front end of line, Wafer bonding, Semiconductors

Proceedings Article | 28 April 2023 Poster + Paper
Giuliano Sisto, Odysseas Zografos, Pieter Weckx, Geert Hellings, Julien Ryckaert
Proceedings Volume 12495, 124951X (2023) https://doi.org/10.1117/12.2656337
KEYWORDS: Design and modelling, Metals, Silicon, Electronic design automation, Nanosheets, Back end of line, Simulations, Resistance, Dielectrics, Tungsten

Showing 5 of 9 publications
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