Dr. Ole Krogh Profile

Dr. Ole Krogh

at Blue Control Technologies

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Author

Publications (3)

Proceedings Article | 29 April 2004 Paper

Propagation of APC models across product boundaries

Tito Chowdhury, Mark Freeland, Ole Krogh, Geethakrishnan Narasimhan, Gayathri Raghavendra

Proceedings Volume 5378, (2004) https://doi.org/10.1117/12.536454

KEYWORDS: Etching, Instrument modeling, Performance modeling, Semiconducting wafers, Process modeling, Process control, Calibration, Data modeling, Semiconductors, Photomasks

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Proceedings Article | 29 April 2004 Paper

Multivariable versus univariable APC

Kamyar Faron, Mark Freeland, Ole Krogh, Sukesh Patel, Gayathri Raghavendra

Proceedings Volume 5378, (2004) https://doi.org/10.1117/12.536472

KEYWORDS: Process control, Etching, Control systems, Semiconducting wafers, Data modeling, Semiconductors, Process modeling, Critical dimension metrology, Diffractive optical elements, Semiconductor manufacturing

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Proceedings Article | 2 June 2003 Paper

Gate etch process control

Ole Krogh, Mark Freeland, Ron Mori, Tito Chowdhury

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.483671

KEYWORDS: Etching, Semiconducting wafers, Process control, Photomasks, Process modeling, Chromium, Semiconductors, Metals, Critical dimension metrology, Lithography

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