Dr. Oleg A. Ageev
at Southern Federal Univ.
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Microelectromechanical systems, Nanotechnology, Silicon, Plasma enhanced chemical vapor deposition, Nanocomposites, Carbon nanotubes, Nanorods, High aspect ratio silicon micromachining

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Thin films, Nanostructures, Switching, Resistance, Photoresist materials, Aluminum, Zinc oxide, Pulsed laser operation, Nanolithography, Lawrencium

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Fabrication, Oxides, Annealing, Surface roughness, Oxygen, Scanning electron microscopy, Acousto-optics, Atmospheric modeling, Atmospheric optics, Absorption

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Nanotechnology, Etching, Gallium arsenide, Ion beams, Atomic force microscope, Plasma etching, Plasma

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Thermodynamics, Plasma, Carbon nanotubes

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Nanotechnology, Nanostructures, Multilayers, Electronics, Graphene, Etching, Ion beams, Silicon carbide, Nanoelectronics

Showing 5 of 9 publications
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