Dr. Olena Romanets
at ASML
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 February 2021 Presentation
Proc. SPIE. 11609, Extreme Ultraviolet (EUV) Lithography XII

Proceedings Article | 29 August 2019 Paper
Proc. SPIE. 11177, 35th European Mask and Lithography Conference (EMLC 2019)
KEYWORDS: Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Reflectivity, Line width roughness

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