The paper is devoted to modeling of thin metallic film on a glass substrate oxidation under the action of ultrashort
laser pulse sequence with taking into account surface and bulk oxidation and electronic excitation.
Ultrashort laser pulse interaction with material involves a number of specialities as compared to longer
irradiations. We study laser heating of metal by femtosecond pulse with taking into account electron photo- and
thermionic emission leading to accumulation of a high positive charge on the target surface and, thus, to the generation
of the electric field which causes Coulomb explosion (an electronic mechanism of ablation). Also emission slightly
influences the thermal and optical properties of solids.