Oliver Horn
at Technische Univ Hamburg-Harburg
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | May 20, 2009
Proc. SPIE. 7366, Photonic Materials, Devices, and Applications III
KEYWORDS: Oxides, Lithography, Silica, Waveguides, Etching, Silicon, Zinc oxide, Thermal oxidation, Oxidation, Nanowires

PROCEEDINGS ARTICLE | May 20, 2009
Proc. SPIE. 7366, Photonic Materials, Devices, and Applications III
KEYWORDS: Amorphous silicon, Refractive index, Channel waveguides, Waveguides, Silicon, Wave propagation, Photomasks, Plasma enhanced chemical vapor deposition, Semiconducting wafers, Light wave propagation

PROCEEDINGS ARTICLE | May 20, 2009
Proc. SPIE. 7366, Photonic Materials, Devices, and Applications III
KEYWORDS: Lithography, Switches, Switching, Thermal optics, Waveguides, Etching, Silicon, Light scattering, Phase shifts, Nanowires

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