Dr. Oliver Paul
at Carl Zeiss AG
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 13, 2013
Proc. SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII
KEYWORDS: Metrology, Data modeling, Scattering, Error analysis, Silicon, Light scattering, Computer simulations, 3D modeling, Scatterometry, Model-based design

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