Dr. Oliver Sandfuchs
at Carl Zeiss Jena GmbH
SPIE Involvement:
Publications (4)

Proceedings Article | 9 May 2012 Paper
Jacqueline Maass, Oliver Sandfuchs, Alexandre Gatto, Daniel Thomae, Robert Brunner
Proceedings Volume 8428, 84281L (2012) https://doi.org/10.1117/12.922217
KEYWORDS: Photomasks, Wave propagation, Opacity, Computer simulations, Binary data, Applied sciences, Visible radiation, Diffraction, Numerical simulations, Optical properties

Proceedings Article | 9 September 2010 Paper
Robert Brunner, Hans Jürgen Dobschal, Reinhard Steiner, Matthias Burkhardt, Arnaud Deparnay, Oliver Sandfuchs, Dennis Lehr, Michael Helgert
Proceedings Volume 7652, 765227 (2010) https://doi.org/10.1117/12.868908
KEYWORDS: Diffraction, Imaging systems, Excimer lasers, Diffractive optical elements, Electromagnetism, Diffraction gratings, Wavefronts, Microlens, Microlens array, Superposition

Proceedings Article | 13 May 2010 Paper
R. Brunner, M. Burkhardt, R. Steiner, O. Sandfuchs
Proceedings Volume 7716, 771611 (2010) https://doi.org/10.1117/12.858254
KEYWORDS: Spectroscopy, Diffraction, Diffraction gratings, Sensors, Manufacturing, Dielectrics, Reflectivity, Spectral resolution, Mirrors, Lithography

Proceedings Article | 14 September 2007 Paper
Proceedings Volume 6675, 66750I (2007) https://doi.org/10.1117/12.731997
KEYWORDS: Diffraction gratings, Dielectrics, Metals, Diffraction, Electromagnetism, Systems modeling, Reflectivity, Refractive index, Imaging systems, Performance modeling

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