Dr. Olivier Dufaud
at Groupe ENSIC-Nancy
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microelectromechanical systems, Ferroelectric materials, Sensors, Polymers, Ceramics, Silicon, Manufacturing, Oxygen, Polymerization, Stereolithography

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