Olivier Os de Sagazan
PhD at STMicroelectronics
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Microelectromechanical systems, Actuators, Oxides, Electrodes, Silicon, Low pressure chemical vapor deposition, Plasma enhanced chemical vapor deposition, Deposition processes, Semiconducting wafers, Plasma

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