Oren Zoran
Physicist at Applied Materials
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 27, 2005
Proc. SPIE. 5645, Advanced Microlithography Technologies
KEYWORDS: Semiconductors, Metrology, Optical lithography, 3D modeling, Scanning electron microscopy, Monte Carlo methods, 3D metrology, Gallium, Tolerancing

PROCEEDINGS ARTICLE | May 24, 2004
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Semiconductors, Metrology, Optical lithography, Silver, Inspection, 3D modeling, Scanning electron microscopy, Monte Carlo methods, 3D metrology, Process control

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