Mr. Orion N. Scott Profile

Orion N. Scott

at Univ of Virginia

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Proceedings Article | 22 March 2006 Paper

Elastomer membrane actuators utilizing ultrathin metal electrodes

Orion Scott, Hilary Bart-Smith, Matthew Begley, Michael Jones

Proceedings Volume 6168, 61681P (2006) https://doi.org/10.1117/12.658713

KEYWORDS: Electrodes, Metals, Actuators, Copper, Microscopes, Aluminum, Dielectrics, Image processing, Silicon, Lead

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We prepare a thin (~100 μm) silicone-based elastomer membrane and sputter ultra-thin copper electrodes (16-192 nm) onto each side of the film. Voltages of varying magnitude (1-8 kV) are applied to the electrodes causing an electrostatic pressure to develop which then compresses the elastomer in the through thickness direction. The edges of the membrane are constrained against in-plane expansion, forcing the membrane to deform out of plane. The in-plane strains developed by applying an electric field are characterized by measuring the stiffness of the membrane via indentation at different applied voltages. Closed-form solutions for membrane deflection are used with the experimental measurements to determine the relationship between the modulus of the cracked electrode/elastomer multi-layer and the electrically induced in-plane strain. Analytical models predicting the relationship between electrode crack spacing, layer properties, and effective modulus of the multi-layer are presented. Building on the knowledge gained from the membrane experiments, uni- axial tension specimens of an electrode/elastomer multi-layer are tested and preliminary results discussed.

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