Dr. Orlando Auciello
Senior Scientist at Argonne National Lab
SPIE Involvement:
Conference Program Committee | Author
Publications (7)

PROCEEDINGS ARTICLE | May 5, 2010
Proc. SPIE. 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II
KEYWORDS: Microelectromechanical systems, Thin films, Diamond, Switches, Silica, Electrodes, Dielectrics, Silicon, Hydrogen, Plasmas

PROCEEDINGS ARTICLE | May 5, 2010
Proc. SPIE. 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II
KEYWORDS: Diamond, Spectrometers, Silicon, Nitrogen, Mass spectrometry, Pollution control, Ionization, Semiconducting wafers, Scanning tunneling microscopy, Carbon nanotubes

PROCEEDINGS ARTICLE | May 12, 2009
Proc. SPIE. 7318, Micro- and Nanotechnology Sensors, Systems, and Applications
KEYWORDS: Microelectromechanical systems, Carbon, Diamond, Resonators, Chemical species, Crystals, Silicon, Silicon films, Semiconducting wafers, Temperature metrology

PROCEEDINGS ARTICLE | May 12, 2009
Proc. SPIE. 7318, Micro- and Nanotechnology Sensors, Systems, and Applications
KEYWORDS: Microelectromechanical systems, Actuators, Thin films, Diamond, Ferroelectric materials, Resonators, Polarization, Electrodes, Silicon, Oxygen

PROCEEDINGS ARTICLE | May 12, 2009
Proc. SPIE. 7318, Micro- and Nanotechnology Sensors, Systems, and Applications
KEYWORDS: Carbon, Thin films, Diamond, Tungsten, Silicon, Scanning electron microscopy, Raman spectroscopy, Semiconducting wafers, CMOS devices, Plasma

PROCEEDINGS ARTICLE | September 28, 2001
Proc. SPIE. 4557, Micromachining and Microfabrication Process Technology VII
KEYWORDS: Microelectromechanical systems, Oxides, Diamond, Optical lithography, Etching, Silicon, Photomasks, Silicon carbide, Reactive ion etching, Plasma

Showing 5 of 7 publications
Conference Committee Involvement (2)
Micro- and Nanotechnology Sensors, Systems, and Applications II
5 April 2010 | Orlando, Florida, United States
Micro- and Nanotechnology Sensors, Systems, and Applications
15 April 2009 | Orlando, Florida, United States
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top