We developed a negative-type photoresist of WOx film and obtained a low noise groove. We also confirmed a feasibility of the transmissive stamper using the WOx film for multi-layer discs.
Practical optics for a cover-layer incident dual-layer disc with an NA=1.45 hemispherical solid immersion lens are designed, using a spherical aberration compensating liquid crystal cell. A hybrid servo system, gap servo for NA >1 and focus servo for NA < 1, is proposed.
KEYWORDS: Molybdenum, Signal detection, Tolerancing, Annealing, Modulation, Objectives, Reactive ion etching, Frequency modulation, Magnetism, Servomechanisms
We confirmed 64 mm-diameter magneto-optical disk systems of 4.7 Giga-byte have sufficiently wide system tolerance by domain-wall-displacement detection disks and land/groove substrates with one-side-wobbled grooves.
We realized acceptable read/write performances at a track pitch of 320 nm and a bit length of 75 nm, even with an NA of 0.65 and a wavelength of 405 nm, using side-wall-annealing. In addition to this result, we suggested the possibility of a higher linear density; that is, a jitter value of less than 15% was obtained both on land and in groove at a bit length of 60 nm, which corresponds to an areal density of 34 Gbit/in2.
We developed a side-wall-annealing technique for land/groove substrates. By applying this technique to our Domain Wall Displacement Detection (DWDD) Magneto-Optical (MO) recording stack formed on a land/groove substrate, even with an NA of 0.6 and a wavelength of 660 nm, we realized a density of 15 Gbit/in2 with a sufficiently wide recording tolerance. This density corresponds to a capacity of 4.7 GB mm disc like MiniDisc.
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