Dr. Oscar E. Hemberg Profile

Dr. Oscar E. Hemberg

PhD Student at JMAR Technologies Inc

SPIE Involvement:

Author

Publications (9)

Proceedings Article | 12 October 2007 Paper

Nanoscale ablation with soft x-ray lasers

Fernando Brizuela, Herman Bravo, Georgiy Vaschenko, Mark Berrill, Benjamin Langdon, Carmen Menoni, Oscar Hemberg, Scott Bloom, Weilun Chao, Erik Anderson, David Attwood, Jorge Rocca

Proceedings Volume 6702, 67020L (2007) https://doi.org/10.1117/12.733401

KEYWORDS: Laser ablation, X-ray lasers, Zone plates, Polymethylmethacrylate, Diffraction, Signal attenuation, Silver, Laser induced breakdown spectroscopy, Spectroscopy, Atomic force microscopy

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Proceedings Article | 6 May 2005 Paper

Liquid metal micro-droplet generator for laser produced plasma target delivery used in an extreme ultra-violet source

J. Algots, Oscar Hemberg, Alexander Bykanov

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.601045

KEYWORDS: Liquids, Plasma, Extreme ultraviolet, Metals, Tin, Ultraviolet radiation, Lithium, High power lasers, Lithography, Plasma generation

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Proceedings Article | 3 November 2004 Paper

Status of the liquid-metal-jet-anode electron-impact x-ray source

Mikael Otendal, Tomi Tuohimaa, Oscar Hemberg, Hans Hertz

Proceedings Volume 5537, (2004) https://doi.org/10.1117/12.558875

KEYWORDS: X-ray sources, X-rays, Electron beams, X-ray imaging, Spatial resolution, Liquids, Metals, Mammography, Absorption, X-ray diffraction

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SPIE Journal Paper | 1 July 2004

Liquid-metal-jet anode x-ray tube

Oscar Hemberg, Mikael Otendal, Hans Hertz

OE, Vol. 43, Issue 07, (July 2004) https://doi.org/10.1117/12.10.1117/1.1737787

KEYWORDS: X-rays, Electron beams, X-ray sources, Liquids, X-ray imaging, Tin, Electrons, Absorption, Optical engineering, Technetium

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Proceedings Article | 7 January 2004 Paper

Liquid-metal-jet anode x-ray source

Oscar Hemberg, Mikael Otendal, Hans Hertz

Proceedings Volume 5196, (2004) https://doi.org/10.1117/12.504719

KEYWORDS: X-rays, Electron beams, X-ray sources, Liquids, Tin, Electrons, X-ray imaging, Absorption, Metals, Lead

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Proceedings Article | 1 July 2002 Paper

Status of the liquid-xenon-jet laser-plasma source for EUV lithography

Bjoern Hansson, Lars Rymell, Magnus Berglund, Oscar Hemberg, Emmanuelle Janin, Jalmar Thoresen, Sofia Mosesson, Johan Wallin, Hans Hertz

Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472274

KEYWORDS: Plasma, Extreme ultraviolet, Xenon, Extreme ultraviolet lithography, Mirrors, Laser applications, Solids, Ions, Nd:YAG lasers, Reflectivity

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Proceedings Article | 20 December 2001 Paper

Liquid-xenon-jet laser-plasma source for EUV lithography

Bjoern Hansson, Lars Rymell, Magnus Berglund, Oscar Hemberg, Emmanuelle Janin, Jalmar Thoresen, Hans Hertz

Proceedings Volume 4506, (2001) https://doi.org/10.1117/12.450943

KEYWORDS: Plasma, Extreme ultraviolet, Mirrors, Xenon, Extreme ultraviolet lithography, Optical filters, Diodes, Solids, Calibration, Reflectivity

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Proceedings Article | 2 November 2000 Paper

Target analysis of laser plasma droplet-target system

Oscar Hemberg, Bjoern Hansson, Hans Hertz

Proceedings Volume 4144, (2000) https://doi.org/10.1117/12.405904

KEYWORDS: Liquids, Plasma, Data modeling, Capillaries, Plasma systems, Laser systems engineering, Cryogenics, X-rays, Bioalcohols, Calibration

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Proceedings Article | 21 July 2000 Paper

Xenon liquid-jet laser plasma source for EUV lithography

Bjoern Hansson, Magnus Berglund, Oscar Hemberg, Hans Hertz

Proceedings Volume 3997, (2000) https://doi.org/10.1117/12.390049

KEYWORDS: Xenon, Plasma, Extreme ultraviolet, Extreme ultraviolet lithography, Liquids, Cryogenics, Laser stabilization, Lithography, Solids, Laser applications

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Showing 5 of 9 publications

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