Dr. Pamela R. Woodruff
at Prism Computational Sciences Inc
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 21, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Plasmas, Tin, Extreme ultraviolet, Extreme ultraviolet lithography, Electrons, Spherical lenses, Foam, Optical simulations, Pulsed laser operation, Ions

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Tin, Plasmas, Optical simulations, Extreme ultraviolet, Ionization, Extreme ultraviolet lithography, Spherical lenses, Electrons, Ions, Data modeling

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Plasma, Tin, Optical simulations, Laser energy, Pulsed laser operation, Extreme ultraviolet lithography, Sensors, Atomic, molecular, and optical physics, Computer simulations, Optical spheres

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Plasma, Tin, Extreme ultraviolet lithography, Ionization, Optical simulations, Opacity, Pulsed laser operation, Electrons, Atomic, molecular, and optical physics, Ions

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top