Dr. Pamela R. Woodruff
at Prism Computational Sciences Inc
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 21, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Foam, Electrons, Ions, Plasmas, Extreme ultraviolet, Optical simulations, Extreme ultraviolet lithography, Spherical lenses, Pulsed laser operation, Tin

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Data modeling, Electrons, Ions, Plasmas, Ionization, Extreme ultraviolet, Optical simulations, Extreme ultraviolet lithography, Spherical lenses, Tin

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Atomic, molecular, and optical physics, Optical spheres, Sensors, Laser energy, Computer simulations, Optical simulations, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Tin

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Atomic, molecular, and optical physics, Opacity, Electrons, Ions, Ionization, Optical simulations, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Tin

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top