Paola Vega-Castillo
at Technischel Univ Hamburg-Harburg
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | June 30, 2005
Proc. SPIE. 5837, VLSI Circuits and Systems II
KEYWORDS: Oxides, Capacitors, Diffusion, Control systems, Computer programming, Photomasks, Transistors, Molybdenum, System integration, Standards development

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