Mr. Paolo Alagna
Sr. Europe Applications Manager
SPIE Involvement:
Author
Publications (11)

PROCEEDINGS ARTICLE | May 1, 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Semiconductors, Light sources, Optical lithography, Deep ultraviolet, Modulation, Scanners, Inspection, Immersion lithography, Image contrast enhancement, Semiconducting wafers

PROCEEDINGS ARTICLE | March 30, 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Light sources, Eye, Metrology, Optical lithography, Image processing, Control systems, Electroluminescence, Process control, Source mask optimization, Optical proximity correction, Critical dimension metrology, Overlay metrology

PROCEEDINGS ARTICLE | March 30, 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Semiconductors, Lithography, Light sources, Metrology, Optical lithography, Deep ultraviolet, Manufacturing, Photomasks, Semiconductor manufacturing, Double patterning technology, Immersion lithography, Source mask optimization, Optical proximity correction, Image contrast enhancement, Semiconducting wafers

PROCEEDINGS ARTICLE | March 23, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Light sources, Optical lithography, Data modeling, Scanners, Manufacturing, Control systems, Process control, Source mask optimization, Optical proximity correction, Critical dimension metrology, Panoramic photography, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | March 16, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Light sources, Logic, Optical lithography, Data modeling, Deep ultraviolet, Etching, Metals, Electroluminescence, Optical proximity correction

PROCEEDINGS ARTICLE | September 4, 2015
Proc. SPIE. 9661, 31st European Mask and Lithography Conference
KEYWORDS: Light sources, Logic, Optical lithography, Modulation, Metals, Scanners, Line width roughness, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

Showing 5 of 11 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top