Paolo Alagna
Project Manager - Memory Division
SPIE Involvement:
Publications (13)

Proceedings Article | 25 March 2020 Presentation
Proceedings Volume 11327, 113270P (2020)

Proceedings Article | 20 March 2018 Presentation + Paper
Proceedings Volume 10587, 1058705 (2018)
KEYWORDS: Light sources, Line width roughness, Semiconducting wafers, Optical lithography, Metrology, Line edge roughness, Etching, Lithography, Temporal coherence

Proceedings Article | 1 May 2017 Paper
Proceedings Volume 10147, 101471X (2017)
KEYWORDS: Light sources, Deep ultraviolet, Optical lithography, Image contrast enhancement, Semiconductors, Immersion lithography, Scanners, Inspection, Modulation, Semiconducting wafers

Proceedings Article | 30 March 2017 Presentation + Paper
Proceedings Volume 10147, 101470N (2017)
KEYWORDS: Optical lithography, Light sources, Lithography, Immersion lithography, Semiconductors, Image contrast enhancement, Deep ultraviolet, Semiconductor manufacturing, Manufacturing, Double patterning technology, Optical proximity correction, Semiconducting wafers, Photomasks, Metrology, Source mask optimization

Proceedings Article | 30 March 2017 Presentation + Paper
Proceedings Volume 10147, 1014707 (2017)
KEYWORDS: Light sources, Process control, Image processing, Source mask optimization, Lithography, Critical dimension metrology, Optical proximity correction, Control systems, Overlay metrology, Optical lithography, Eye, Metrology, Electroluminescence

Showing 5 of 13 publications
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