Dr. Paolo Parisi
at KLA Italy Srl
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Optical lithography, Manufacturing, Inspection, Process control

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Lithography, Defect detection, Manufacturing, Inspection, Process control, Defect inspection

Proceedings Article | 28 March 2017 Paper
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Deep ultraviolet, Modulation, Image processing, Image analysis, Scanning electron microscopy, Optical inspection, Photomasks, Extreme ultraviolet, Semiconducting wafers, Defect inspection

Proceedings Article | 19 March 2015 Paper
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Visualization, Imaging systems, Image processing, Inspection, Scanning electron microscopy, Process control, Microelectronics, Semiconductor manufacturing, Semiconducting wafers, Defect inspection

Proceedings Article | 19 March 2015 Paper
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Metrology, Silicon, Inspection, Scanning electron microscopy, Image quality, Bridges, Directed self assembly, Image classification, Semiconducting wafers, Defect inspection

Showing 5 of 7 publications
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