Pardeep Kumar
at IIT Gandhinagar
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | April 28, 2018
JM3 Vol. 17 Issue 02
KEYWORDS: Calibration, Data modeling, Process modeling, Autoregressive models, Lithography, Photomasks, Statistical modeling, Monte Carlo methods, Photoresist processing, Optical proximity correction

SPIE Journal Paper | May 18, 2015
JM3 Vol. 14 Issue 02
KEYWORDS: Lithography, Statistical modeling, Optical proximity correction, Process modeling, Calibration, Data modeling, Photomasks, Performance modeling, Computer simulations, CMOS technology

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