Dr. Pascal Meyer
at Karlsruher Institut fuer Technologie
SPIE Involvement:
Author
Publications (5)

SPIE Journal Paper | 15 May 2019
JM3 Vol. 18 Issue 02
KEYWORDS: X-ray lithography, Photomasks, Gold, X-rays, Photoresist materials, Near field diffraction, Titanium, Electrons, Photons, Scanning electron microscopy

SPIE Journal Paper | 12 January 2017
JM3 Vol. 16 Issue 01
KEYWORDS: Photomasks, X-rays, X-ray imaging, Synchrotrons, Scanners, Visibility, Gold, Sensors, Phase shifts, Interferometers

SPIE Journal Paper | 17 October 2016
JM3 Vol. 15 Issue 04
KEYWORDS: Polymethylmethacrylate, Rapid manufacturing, Surface roughness, Prototyping, Photomasks, Nickel, Optical alignment, Single mode fibers, Connectors, Etching

Proceedings Article | 19 March 2014
Proc. SPIE. 9033, Medical Imaging 2014: Physics of Medical Imaging
KEYWORDS: Silicon, X-rays, Phase contrast, X-ray imaging, Semiconducting wafers, Absorption, Biomedical optics, Scattering, Interferometry, Image restoration

Proceedings Article | 30 August 1999
Proc. SPIE. 3874, Micromachining and Microfabrication Process Technology V
KEYWORDS: Polymethylmethacrylate, X-ray lithography, X-rays, Synchrotron radiation, Photomasks, Metals, Photoelectric effect, Polymers, Electroplating, Fabrication

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