Dr. Pascal Silberzan
at Institut Curie
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 23, 2003
Proc. SPIE. 5345, Microfluidics, BioMEMS, and Medical Microsystems II
KEYWORDS: Proteins, Visualization, Calibration, Etching, Microscopy, Silicon, Scanning electron microscopy, Microfabrication, Semiconducting wafers, Cell mechanics

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