Dr. Patrick Carazzetti
at École Polytechnique Fédérale de Lausanne
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 1 July 2009
JM3 Vol. 8 Issue 03
KEYWORDS: Electrodes, Argon, Protactinium, Microelectromechanical systems, Helium, Aluminum, Electrons, Electrical breakdown, Nitrogen, Plasma

Proceedings Article | 14 February 2008
Proc. SPIE. 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
KEYWORDS: Microelectromechanical systems, Argon, Electrodes, Electrons, Gases, Nitrogen, Aluminum, Helium, Plasma, Protactinium

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