Dr. Patrick Hole Profile

Dr. Patrick Hole

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 22 February 2021 Presentation + Paper

An innovative probe microscopy solution for measuring conductivity profiles in 3-dimensions

U. Celano, K. Paredis, A. D. L. Humphris, M. Tedaldi, C. O'Sullivan, J. P. Hole, J. Goulden

Proceedings Volume 11611, 116110J (2021) https://doi.org/10.1117/12.2583065

KEYWORDS: 3D metrology, Microscopy, Metrology, Switching, Tomography, Semiconductor manufacturing, Gallium arsenide, Diamond, 3D equipment, Transmission electron microscopy

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years