Dr. Patrick Leisching
VP R&D at TOPTICA Photonics AG
SPIE Involvement:
Author
Publications (16)

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Light sources, Continuous wave operation, Lithographic illumination, Crystals, Semiconductor lasers, Diffusers, Photomasks, Beam shaping, Semiconducting wafers

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Continuous wave operation, Microlens array, Lithographic illumination, Diffractive optical elements, Semiconductor lasers, Diffusers, Light sources and illumination, Beam shaping, 193nm lithography

PROCEEDINGS ARTICLE | February 23, 2018
Proc. SPIE. 10535, Integrated Optics: Devices, Materials, and Technologies XXII
KEYWORDS: Semiconductors, Laser sources, Deep ultraviolet, Ultraviolet radiation, Semiconductor lasers, Collimation, Temperature metrology, Laser systems engineering, Light

PROCEEDINGS ARTICLE | February 22, 2018
Proc. SPIE. 10539, Photonic Instrumentation Engineering V
KEYWORDS: Oscillators, Photodiodes, Semiconductor lasers, Signal processing, Laser stabilization, Gas lasers, Diodes, Optical isolators, Temperature metrology, Absorption

PROCEEDINGS ARTICLE | February 22, 2018
Proc. SPIE. 10528, Optical Components and Materials XV
KEYWORDS: Optical amplifiers, Waveguides, Polarization, Polarization maintaining fibers, Cladding, Semiconductor lasers, Laser stabilization, Iodine, Distributed Bragg reflectors, Micro optics, Helium neon lasers, Optical isolators, Group III-V semiconductors, Absorption

PROCEEDINGS ARTICLE | February 20, 2018
Proc. SPIE. 10513, Components and Packaging for Laser Systems IV
KEYWORDS: Semiconductors, Semiconductor optical amplifiers, Semiconductor lasers, Distributed feedback laser diodes, Laser systems engineering

Showing 5 of 16 publications
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