Mr. Patrick M. Mayrhofer
at Univ of Technology Vienna
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 21, 2015
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Microelectromechanical systems, Thin films, FT-IR spectroscopy, Argon, Annealing, Crystals, Aluminum nitride, Absorbance, Scandium, Temperature metrology

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